Spectral Confocal Sensor is a high-precision non-contact measurement device based on optical dispersion principle and confocal imaging technology, which can realize sub-micron resolution, multi-material compatibility and anti-environmental interference capability, and has become a core tool in precision manufacturing, semiconductor inspection and other fields.
1. white light dispersion: through the dispersion lens will be composite white light decomposition into different wavelengths of monochromatic light, the formation of spatial distribution of the spectrum by wavelength.
2. confocal focusing: only allows a specific wavelength of light focused on the surface to be measured, the reflected light returned along the original path, filtered by the pinhole and analyzed by the spectrometer.
3. wavelength-distance mapping: changes in the height of the surface of the object to be measured will lead to a shift in the wavelength of the returned light, which can be analyzed by spectral analysis to solve the exact distance value.
Spectral Confocal Sensor SFS-D8080 Parameters
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